http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11286469-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_526cb931f1382d6e016ee651d55e1365
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-753
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F222-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F232-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-533
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C67-347
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F22-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F232-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F222-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-753
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F32-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F4-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C67-347
filingDate 1998-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b8de372eb968768b9fca1f105238a97
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee40ce68d3315e15ea938c010246647b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf90fc148d51b000194789d366cd969d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60f3e37e1e64aefd4e02721005c010c6
publicationDate 1999-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H11286469-A
titleOfInvention Monomer, polymer, method for producing monomer, method for producing polymer, photoresist, method for producing photoresist, and semiconductor device
abstract (57) [Problem] To provide a photoresist which has resistance to KrF or ArF laser, can be developed with a TMAH aqueous solution, and has excellent adhesiveness. SOLUTION: A polymer obtained by polymerizing a monomer, which is a novel bicycloalkene derivative represented by the following formula (I), and a photoresist containing the polymer. Embedded image In the above formula, R ′ and R ″ each represent hydrogen or carbon atom 1 Is up to 4 substituted or unsubstituted linear or side chain alkyls, m is a number from 1 to 8, and n is a number from 1 to 6.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6312865-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9994516-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009093186-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6632903-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7084227-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008291219-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017137376-A1
priorityDate 1997-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593329
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25188
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID166653
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID33101
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420017144
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413462458
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456171974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419490115
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8033
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10352
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6228
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23502028
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1031
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412820179
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426178379
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7187
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8040
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID231040098
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527710
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID231041553
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22141864
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID92696
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559594
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859283
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419596525
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID78949
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7612
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559592
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521419
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411578613
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23431551
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76169
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15458
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409500530
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226416307
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226416308
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7946
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415729464
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID455151449
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474459
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19817373
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3283
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226413611
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414676677
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6569
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419485438
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1100
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426217785
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393640
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410381000
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21960936
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423075326
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414869904
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226414046
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61019
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82347
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7967
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11729320
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423075329
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID241
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11435525
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454152872
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87059424
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423075327
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226557258
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423075328
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82767
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53630827
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID153802474
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415791859
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410932322
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22987067
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3015432
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID428411633
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID58277222
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12012
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410500524
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1140
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411329314
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67610817
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21951588
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423124416
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419555171
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420209215
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411402389
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456922693
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8028
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18452915
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31275
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411224273
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423391080
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18413667
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411222974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421325977
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423075325
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423075330
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID429281880
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421257378
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425989319
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419890815
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415758965
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12989
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15607334
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410295591
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411265559
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22987063
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419489307
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15608148
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22987064
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22987062
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559219
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7923
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523914
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22987065
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419510554
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22272102
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3554581
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22987066
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426804563
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19710
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71437679
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539429
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75588
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID263
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448674543
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416218341
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID783
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425193155
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559283

Total number of triples: 167.