http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11269230-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fc6220b93fae4be14ada49e4ecc1860b http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F212-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F212-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 1998-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_638de2a9f78d01322c79d6582fbb0094 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c1406fa117a8ba162b5c26fd357b725 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f26eb42f681042be2c10ccfed20dd22b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6744a67635ff95df5490276fc5a01d61 |
| publicationDate | 1999-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H11269230-A |
| titleOfInvention | New polymer |
| abstract | (57) [Abstract] (With correction) [Problem] To have extremely high resolution performance for a light source of 300 nm or less, for example, far ultraviolet light, and to be able to maintain a stable pattern dimension over time. Provided is a resist material from which a fine pattern having a good shape on the order of microns can be easily obtained. SOLUTION: The general formula [1] [In the formula, R 1 represents a hydrogen atom or a methyl group, R 2 and R 3 is each independently a hydrogen atom or a straight-chain having 1 to 6 carbon atoms, Represents a branched or cyclic alkyl group, a linear or branched haloalkyl group having 1 to 6 carbon atoms, or a phenyl group; and R 2 and R 3 form a methylene chain having 2 to 5 carbon atoms. R 4 represents a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms, and R 5 represents a hydrogen atom, a halogen atom, a linear chain having 1 to 6 carbon atoms, It represents a branched or cyclic alkyl group or the like, and k, r and m each independently represent a natural number. ] The polymer shown by these. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002020424-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005344115-A |
| priorityDate | 1994-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 412.