| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-034
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-225 |
| filingDate |
1997-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea2b0547f39e9bb7e11e2991f11f4c10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44429cadbfd0e909d603a626906b1317 |
| publicationDate |
1999-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H1126838-A |
| titleOfInvention |
Optical device for ultraviolet laser |
| abstract |
(57) [Problem] To provide an ultraviolet laser optical device having a chamber for enclosing an optical system with nitrogen gas and capable of shortening the time for nitrogen gas replacement. An optical system for an ultraviolet laser includes an optical system (mirror 100, lens 101) for handling an ultraviolet laser. And the like, and a chamber 48 for enclosing the optical system in nitrogen gas. A nitrogen gas storage tank 6 is provided between the main pipe 1 for supplying nitrogen gas and the chamber 48. If a large amount of clean nitrogen gas used during nitrogen replacement is stored near the chamber, a large amount of nitrogen gas can be sent into the chamber in a shorter time. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015068205-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10164396-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1722451-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006119930-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015068205-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9825417-B2 |
| priorityDate |
1997-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |