| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6c8d4dc7bd1a30d8fda907fceaeb4e69 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-10 |
| filingDate |
1998-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c3732e0844ad07e4ef10818aea80ae4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_236529029c062eaa9b95940169977793
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4f5421c4373b33b591fc61e87720851
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c393e4e5e40cac612d3b9cbeda46913f |
| publicationDate |
1999-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H11260918-A |
| titleOfInvention |
Chemical liquid for metal oxide film formation |
| abstract |
(57) [Problem] To provide a chemical solution capable of forming an oxide film having excellent insulation properties and hardly generating hillocks by using at the time of anodic oxidation of metal with high throughput. A chemical liquid for forming a metal oxide film is obtained by dissolving a salt of an aliphatic dicarboxylic acid having 3 to 5 carbon atoms having no hydroxyl group as a solute in a solvent having an alcoholic hydroxyl group. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9368514-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9786687-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9059045-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-1316068-C |
| priorityDate |
1997-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |