http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11259812-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44b2ac87aeadb161b83426d9cf6c4bdc |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49043 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49052 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49062 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-3163 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49044 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-313 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-17 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-31 |
| filingDate | 1998-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c01e941df9be56799fea99a09d7032e |
| publicationDate | 1999-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H11259812-A |
| titleOfInvention | Thin film magnetic head and method of manufacturing the same |
| abstract | (57) Abstract: A first magnetic layer, a write gap layer, and a second magnetic layer are provided on a base, and one or more magnetic layers are provided between the first magnetic layer and the second magnetic layer. In a thin-film magnetic head provided with a thin-film coil having at least one layer, in order to shorten the magnetic path length of the thin-film coil, the interval between successive coil windings of at least one thin-film coil is narrowed to improve the characteristics. A magnetic head and a method for accurately and stably manufacturing the same. SOLUTION: A silicon oxide layer 37 is formed on a first magnetic layer 36, coil-shaped grooves 38 are formed on the surface of the silicon oxide layer at short intervals, and a copper layer is deposited by Cu-CVD. Thus, the surface of the first magnetic layer 37 is polished until the surface is exposed, thereby forming a coil winding body 40 of the first-layer thin-film coil, and a write gap layer 41 is further formed thereon. Since an inorganic insulating layer such as silicon oxide, silicon nitride, or alumina that can be finely processed is used, the interval between the coil windings 40 can be formed at a minute interval of 0.3 to 0.5 μm. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6567239-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6813824-B2 |
| priorityDate | 1998-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.