| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-08 |
| filingDate |
1998-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4703fab4a5c5dc96b749eb102b113e7 |
| publicationDate |
1999-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H11251666-A |
| titleOfInvention |
Laser light generation method and apparatus |
| abstract |
(57) [Problem] To generate a laser beam having a wavelength of about 193 nm with a simple configuration. SOLUTION: A wavelength of 236.degree. Which is a fourth harmonic of a laser beam having a wavelength of 946 nm emitted from an Nd: YAG laser. 5 nm laser light (e) and Nd: YAG laser or N d: wavelength 1047 nm to 1 emitted from the YLF laser The laser light (g) having a wavelength of about 193 nm is mixed with the laser light (g) having a wavelength of about 193 nm by sum frequency mixing. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8503068-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009540538-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011123822-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6862131-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002258339-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2372449-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7362783-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-02103863-A1 |
| priorityDate |
1998-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |