http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11238747-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-56 |
| filingDate | 1998-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d95307b9173dcb059d1f78d207e45fd |
| publicationDate | 1999-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H11238747-A |
| titleOfInvention | Mold resin etching method and etching apparatus |
| abstract | (57) [Problem] To provide a mold resin which can be efficiently and efficiently controlled and economically etched regardless of the glass transition temperature Tg of the mold resin. An etching method and an apparatus for etching a mold resin are provided. SOLUTION: A mold resin for etching a mold resin 8 of a completed chip 21 using a chemical solution 5 for decomposing a resin component of a mold resin 8 and a laser beam 4 having a function of increasing the temperature of the chemical solution 5. Etching method and apparatus. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1276142-A3 |
| priorityDate | 1998-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.