http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11218937-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f8cfa5aee4410611b5c562275c9f8e3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate | 1998-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fae1e3aa96c0e563c390c37fb6ef2f29 |
| publicationDate | 1999-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H11218937-A |
| titleOfInvention | Solvent for cleaning and removing resist, and method for producing base material for electronic parts |
| abstract | PROBLEM TO BE SOLVED: To provide a coating composition for resist formation or a solvent for cleaning and removing a resist, which shows excellent solubility in a wide range of coating compositions for resist formation or resist. SOLUTION: A solvent for washing and removing is a solvent for washing and removing a coating composition for resist formation or a resist, and contains a carbonate ester such as dimethyl carbonate and diethyl carbonate. In the production of a base material for electronic parts, a cleaning step of cleaning and removing unnecessary resist-forming coating composition or resist adhered on a substrate with the above-mentioned cleaning and removing solvent is provided so that the resist film thickness is uniform. Is obtained. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100744981-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001313290-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6524775-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0184615-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6531267-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4539790-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015081293-A |
| priorityDate | 1998-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 198.