http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11214508-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
filingDate | 1998-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_facad264aa0a458f84a96062ff3f2e3f |
publicationDate | 1999-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-H11214508-A |
titleOfInvention | Semiconductor device |
abstract | (57) [Summary] In a semiconductor device having a multi-layer wiring and a large area in which a lower layer portion is hidden by an upper layer wiring, observing, analyzing, and correcting the lower layer wiring and elements impairs the electrical function of the device. To be able to do it easily. A narrow wiring (3) is formed on a lower surface of a wide wiring (2). Even if only the wide portion 2 of the upper wiring is removed by ion beam, laser, polishing or the like, the remaining narrow wiring 3 and the connection between the narrow wiring 3 and the lower wiring 5 or the circuit below it. Is The connection is the minimum necessary to supply power and signals required for the operation of the device from the external terminal through the narrow wiring 3. The narrow wiring 3 may be a plurality of steps having a stepped cross section. If a stylus pad is provided separately from the narrow wiring 3 under the wide wiring 2, current supply can be complemented. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014170976-A |
priorityDate | 1998-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.