http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11214245-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1476752f2420c8f8eb53464cf7fc922b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01G4-33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01G4-30 |
| filingDate | 1998-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf6511ca88f80805ccf6f944717df41a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e60ca2db9c7d02a00bbaebbb7d85b474 |
| publicationDate | 1999-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H11214245-A |
| titleOfInvention | Thin film multilayer capacitor and method of manufacturing the same |
| abstract | (57) [Problem] To provide a thin film multilayer capacitor having good dielectric characteristics and little change in characteristics over time, and a method for manufacturing such a thin film multilayer capacitor. A thin film multilayer capacitor includes a substrate. On a substrate 12, a thin film dielectric layer 14, an electrode layer 16, An external electrode connected to the electrode layer is formed. The protection film 20 is formed on a portion corresponding to the portion where the thin film dielectric layer 14 is formed. In order to manufacture the thin film laminated capacitor 10, a thin film dielectric layer 14, an electrode layer 16, and an external electrode 18 are formed on a substrate 12 by a CVD method or the like. The obtained laminate is heat-treated under a high oxygen partial pressure, and then a protective film 20 is formed. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7319081-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6876536-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7145198-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7312514-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7580241-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2004065668-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7745869-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6930875-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7242044-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4706479-B2 |
| priorityDate | 1998-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.