| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-74 |
| filingDate |
1998-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee11d8c0c46490a7ca64c7054ec2b82a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39685ad8f79b6899342186548c2b93fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6d1bc1d5d8d9c65737fe170da417a7b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0730db38b17da03272524db81acf889a |
| publicationDate |
1999-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H11204403-A |
| titleOfInvention |
How to fix the mask |
| abstract |
(57) Abstract: A defect of an X-ray reduction exposure mask is corrected in a short time and with high processing accuracy. SOLUTION: An excess defect of an absorber is removed by using gas assisted etching by FIB, and a missing defect of the absorber is reduced to a gas containing a substance having substantially the same or similar optical properties to the substance of the absorber in the vicinity of the defect. Correct by spraying and assisting with FIB. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111610693-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100403933-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111610693-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014032312-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009010373-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011238800-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012124372-A |
| priorityDate |
1998-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |