http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11202117-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6c8d4dc7bd1a30d8fda907fceaeb4e69 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1998-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f30205a9cf2ad659d443044f9b478c00 |
| publicationDate | 1999-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H11202117-A |
| titleOfInvention | Manufacturing method of color filter |
| abstract | (57) [Problem] To develop a color filter, in which a fine pattern without unevenness can be formed on a resist surface. SOLUTION: In a color filter manufacturing process in which a colored resist is coated on a transparent substrate by heat drying, exposure, development, and thermosetting processes, a pre-wet treatment process is performed after the exposure process and before the development process. Having a pre-wet treatment step, the same liquid as the developing solution used in the developing step flows down onto the substrate being transported from the slit-shaped nozzle opened in a direction perpendicular to the substrate transport direction, A method for producing a color filter, comprising a step of flowing a developing solution in a direction opposite to a transport direction of a substrate. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017164126-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013225628-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006338043-A |
| priorityDate | 1998-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 68.