http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11195498-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bcdb7859d196574348806c539e0e92d6 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 |
| filingDate | 1998-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2324a534ca9034391d609721b49c088e |
| publicationDate | 1999-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H11195498-A |
| titleOfInvention | DC plasma generator |
| abstract | (57) Abstract: Provided is a DC plasma generator 10 capable of heating a substrate surface to a high temperature and generating a high-density plasma 102. SOLUTION: An anode 14 which is provided on a central axis 142 and has a cylindrical structure which is rotatable with respect to the central axis 142, and a central axis 1 of the anode 14 surrounding the anode 14 is provided. Spiral center axis 121 (cathode center axis 121) for 42 And a spiral structure cathode 12 composed of a plurality of heat generating wires having a predetermined diameter and having a helical diameter 122 larger than the diameter 144 of the anode 14 and having a helical diameter 122 larger than the diameter 144 of the anode 14. |
| priorityDate | 1998-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.