http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11193472-A

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b5dbd706ddfe65f9b76e8a905a62a9ac
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-12
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-12
filingDate 1997-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66037b4556295da02bd187a0f8ead631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f7abc0caf1a556438efef69633cffd6
publicationDate 1999-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H11193472-A
titleOfInvention Method for producing metal oxide thin film
abstract [PROBLEMS] To form a thin film of a crystallized transition metal oxide on a substrate having low heat resistance, such as plastics, without using expensive manufacturing equipment, and to form a film. The present invention provides a method that is not restricted by the shape and size of the substrate to be formed. SOLUTION: A precursor coating solution of a metal oxide obtained using a transition metal alkoxide or salt as a starting material is applied to the surface of an object to be coated, and a coating film is formed on the surface of the object to be coated. Is irradiated with ultraviolet light having a wavelength of 360 nm or less to crystallize the transition metal oxide forming the coating film.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100665263-B1
priorityDate 1997-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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