http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11193462-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b70f21b272a91a9a9f6f774bc765e7b2 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate | 1997-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce8d0b57412e0617823cf5a0aebbc2d8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9305629834f7b617866b0b336afca9ab |
| publicationDate | 1999-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H11193462-A |
| titleOfInvention | Method for vaporizing organic alkaline earth metal complex in CVD method |
| abstract | PROBLEM TO BE SOLVED: To provide an alkaline earth metal complex which is a raw material of an alkaline earth metal without changing over time and a high film forming rate when an alkaline earth metal-containing thin film is produced by a CVD method. Is vaporized so as to obtain. SOLUTION: An organic alkaline earth metal complex is heated once to a melting point or more and melted. Then, the melt is cooled and solidified in the raw material container, and the solidified organic alkaline earth metal complex is vaporized at a temperature lower than its melting point. Furthermore, The melt is cast into a cylindrical container so that a solidified layer extending in the longitudinal axis direction of the container and having a substantially constant thickness is formed, and a carrier gas is caused to flow through the container in the longitudinal axis direction. Thus, the organic alkaline earth metal complex is vaporized from the solidified layer at a temperature lower than its melting point. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10895010-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007538393-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9598766-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013028854-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8170404-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015038252-A |
| priorityDate | 1997-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.