http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11183339-A

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28
filingDate 1997-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e3b92dd85ff4fe8c5eebb6cdfec8c05
publicationDate 1999-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H11183339-A
titleOfInvention TEM sample preparation method
abstract (57) [Summary] [PROBLEMS] To facilitate the preparation of a sample of a transmission electron microscope at a specific location. SOLUTION: A sample 1 is sliced by dicing saw processing. Next, an electron beam is applied to the vicinity of the observation specific portion 2 of the sample 1 to deposit a reaction product 3. Next, the sample 1 is coated with the plasma polymerized film 4. Next, by scanning the sample 1 with a focused ion beam, the observation specific portion is set to a thickness of 0.1 μm. Sputter-etch to thickness.
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priorityDate 1997-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 27.