abstract |
(57) [Summary] [PROBLEMS] To facilitate the preparation of a sample of a transmission electron microscope at a specific location. SOLUTION: A sample 1 is sliced by dicing saw processing. Next, an electron beam is applied to the vicinity of the observation specific portion 2 of the sample 1 to deposit a reaction product 3. Next, the sample 1 is coated with the plasma polymerized film 4. Next, by scanning the sample 1 with a focused ion beam, the observation specific portion is set to a thickness of 0.1 μm. Sputter-etch to thickness. |