http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11160732-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1368 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| filingDate | 1997-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00078a5a94db0ac3248fe4dca0f77812 |
| publicationDate | 1999-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H11160732-A |
| titleOfInvention | TFT array substrate, liquid crystal display device using the same, and method of manufacturing TFT array substrate |
| abstract | [PROBLEMS] To provide a liquid crystal display device having a high aperture ratio and excellent display quality at a high yield by preventing the occurrence of linear display defects caused by disconnection or short circuit of a TFT array substrate. SOLUTION: After a metal film such as Cr is formed on the surface of a glass substrate 1, patterning is performed to form a gate electrode and a wiring 2, a redundant wiring 3 and a branch-like auxiliary capacitance electrode 4 as shown in FIG. I do. At this time, after exposing with an appropriate exposure amount using a mask pattern serving as a design resist pattern, exposure is performed again using a mask pattern that is about 3 μm thicker than the design resist and with energy about 2 to 10 times the appropriate exposure amount. . According to this structure, a disconnection occurs due to a defect at the time of patterning or peeling of the resist at the time of etching. Occurs, the signal can be transmitted through the redundant wiring 3. Even when the pattern defect 15 occurs, a short circuit does not occur unless the pattern defect 15 occurs near the tip of the auxiliary capacitance electrode 4 on the branch. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8045072-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8873011-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100395935-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007322297-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9048146-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100413077-C http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7557373-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9368514-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9298056-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100425859-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9429807-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9059045-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030038327-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9786687-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9099355-B2 |
| priorityDate | 1997-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.