| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7c5a4ae81822d214a07bf55ad61bd1cf |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-48 |
| filingDate |
1997-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9049d551b4c2848ae3db4f4a0f055ab5 |
| publicationDate |
1999-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H11158627-A |
| titleOfInvention |
Ion beam irradiation equipment |
| abstract |
(57) [Problem] To safely introduce an ion source gas from a gas source provided in a ground potential portion into a plasma generation section to which a high voltage of an ion source is applied. SOLUTION: A double insulating tube 40 having an inner insulating tube 42 and an outer insulating tube 44 surrounding the inner insulating tube 42 is provided, and a gas source 24 for supplying an ion source gas 26 is installed at a ground potential portion. One end of the inner insulating tube 42 of the double insulating tube 40 is connected to the gas source 24 by a metal pipe 32, and the other end is connected to the plasma generation unit 4 of the ion source 2 by a metal pipe 34. Further, a vacuum exhaust device 64 is provided in the ground potential portion and evacuates the space between the inner insulating tube 42 and the outer insulating tube 44 of the double insulating tube 40. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004508681-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100735668-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009000930-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113623543-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101166271-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0221566-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016502035-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105556641-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210137376-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007273118-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015122325-A |
| priorityDate |
1997-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |