| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2002-14411 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 |
| filingDate |
1997-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2034d70571284d0f65602b1ec4d8cf88 |
| publicationDate |
1999-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H11157073-A |
| titleOfInvention |
Method of manufacturing ink jet recording head |
| abstract |
[PROBLEMS] To provide a wafer etching method suitable for manufacturing a printer head capable of obtaining a predetermined pattern in one etching step without using a plurality of types of mask layers. I do. A method of manufacturing an ink jet recording head according to the present invention includes a first step of forming a thin film on a surface of a substrate, and etching the thin film to form a thin film having a partially different thickness. And a third step of etching the substrate 10 on which the thin film 102 having a partially different thickness is formed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2005028207-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006123518-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007268961-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7559631-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005028207-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4735755-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010042683-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011148296-A |
| priorityDate |
1997-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |