http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11147787-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6572cb234427884c68b50886151f47e7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-06 |
| filingDate | 1997-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbd6fee741405bacb7c19ea8b56be147 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b2129e7ca66286812974c1189df1fef http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01d6b67bd39bf9e1614d3af92fa257c2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2eb732233abe724cd88a3e6a8d7b1bb8 |
| publicationDate | 1999-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H11147787-A |
| titleOfInvention | Epitaxial growth furnace |
| abstract | (57) [Problem] To provide an epitaxial growth furnace capable of greatly reducing a temperature difference generated between the front and back of a wafer as compared with the conventional one while having a simple configuration in heating a wafer during epitaxial growth. SOLUTION: In an epitaxial growth furnace, a holding mechanism faces a pair of semiconductor wafers inside a reaction chamber such that the surfaces thereof face each other at an interval, and the back surface of each semiconductor wafer is exposed to an inner wall of the reaction chamber. And a pair of heaters for irradiating radiant heat to each back surface of the semiconductor wafer provided with a pair of heaters for irradiating radiant heat to each back surface of both semiconductor wafers. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014525135-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015533195-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015015479-A |
| priorityDate | 1997-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327210 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426098976 |
Total number of triples: 20.