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filingDate 1997-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2665c540be563c983be973c708450df
publicationDate 1999-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H11147317-A
titleOfInvention Nozzle plate manufacturing method
abstract (57) Abstract: A method of manufacturing a nozzle plate, which can reliably manufacture a nozzle plate having a nozzle having a small hole diameter composed of a small-diameter straight portion and a large-diameter taper portion. The purpose is to: A method of manufacturing a nozzle plate having a plurality of nozzles each including a straight portion having a small diameter and a tapered portion having a large diameter, comprising: using a substrate having a plurality of conical projections; A nozzle forming layer 58 that covers the surface having the protrusions is formed by electroforming, the nozzle forming layer is separated from the substrate, and the conical protrusions are formed on the traces of the tips of the conical protrusions of the nozzle forming layer. Laser irradiation is performed from the side where there was, a through hole is formed at the mark of the tip of the conical protrusion of the nozzle forming layer, and the mark of the tip of the conical protrusion and the through hole are formed as the nozzle 32. Configuration.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4661208-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007112145-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005289039-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6871400-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6918658-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6631980-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4666268-B2
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