http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1114606-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ecdfc9030125055f06a260938acdacab http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b7947c26de6ffc9e68cec72b1f38479 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01H5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-00 |
| filingDate | 1997-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29dd695e20fce3f0b507d4096179ca59 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ab8452460ab32831372dee0bfe76869 |
| publicationDate | 1999-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H1114606-A |
| titleOfInvention | Method for measuring aluminum content in aluminum etchant |
| abstract | (57) [Problem] To continuously manage the aluminum content in an aluminum etchant to facilitate the management of the aluminum etchant, thereby extending the life of the aluminum etchant and reducing the frequency of replacement. cut back. SOLUTION: An ultrasonic wave is oscillated in an aluminum etching solution used for etching an aluminum film and in which aluminum is dissolved, a sound velocity in the aluminum etching solution is measured, and the aluminum content in the aluminum etching solution and the ultrasonic wave are measured. The aluminum content is calculated from the measured sound velocity value using the correlation with the sound velocity value. |
| priorityDate | 1997-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.