http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11145227-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bb009cce0f8e0a13a2e6d9675616c640 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1997-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_368f4b690b3e0bb306157b8e29b0a19d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ed52585504ea1ba31d960506e17bbf3 |
| publicationDate | 1999-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H11145227-A |
| titleOfInvention | Temperature control equipment for semiconductor wafer test equipment |
| abstract | (57) [Summary] A wafer temperature control plate capable of maintaining a semiconductor wafer at a uniform temperature with high accuracy in a burn-in test is disclosed. A temperature-adjusting plate for uniformly maintaining a predetermined temperature while energizing a wafer, comprising: a thermally conductive disk; The cooling fluid flow path 6 in which the flow path expands as the cooling fluid flows from the central part toward the peripheral part, and an electric heating line in which the heat generating wires are arranged so that the peripheral part is dense and the central part is sparse. A wafer temperature adjusting plate comprising a heater 7, temperature sensors 5a to 5c, and a temperature controller C, wherein the temperature of a central portion is set to be low and the peripheral portion is set to be high according to a temperature difference of a wafer. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7554350-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008128839-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009123555-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100745032-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005510044-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7397258-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101296817-B1 |
| priorityDate | 1997-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419573697 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9397 |
Total number of triples: 21.