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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7ef01e33058cf740cf2197991be97af1
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022
filingDate 1997-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2cf586b63a97e79102d0c42d610e565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d50c5a631b8b921f5e3bc9110d5dc3a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7914941d2229c11a380c507a8bd7e92
publicationDate 1999-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H11143065-A
titleOfInvention Radiation-sensitive resin composition
abstract PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition suitable as a positive resist, which can provide high resolution, high sensitivity and an excellent pattern shape. SOLUTION: Alkali-soluble resin, the following formula A radiation-sensitive resin composition containing a phenol compound represented by the formula: and a 1,2-quinonediazide compound.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006082796-A1
priorityDate 1997-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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