http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11142607-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B3-00 |
filingDate | 1997-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ba44909e2d46d824ce3ee736e55ee70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2210903937c946e48a70c6a804962c50 |
publicationDate | 1999-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-H11142607-A |
titleOfInvention | Microlenses, microlens arrays, and methods of manufacturing them |
abstract | PROBLEM TO BE SOLVED: To stably manufacture a large number of microlenses having a high numerical aperture and good shape accuracy. SOLUTION: A silicon substrate 1 on which at least one concave portion 1a is formed is prepared. Next, an optical glass 4 to form a microlens is formed on the entire surface of the substrate 1 so that the concave portion 1a of the substrate 1 is embedded. Then, the substrate 1 The optical glass 4 formed on a portion other than the concave portion 1a of the optical glass 4 formed thereon is removed. Finally, substrate 1 By selectively eluting 1, the hemispherical optical glass 4, that is, the minute lens, is separated from the substrate. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100399060-C http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6790373-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009251173-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007065126-A |
priorityDate | 1997-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 61.