| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d97cb748898aa080b013f7f35bc8b434 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-70 |
| filingDate |
1997-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60024dfc25b8da03a232569a3b3c2298
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba3808c41df5c07cb590dbc76633f9ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6200ab2aff46265b12780b123fbe6c20 |
| publicationDate |
1999-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H11138113-A |
| titleOfInvention |
How to remove fine particles |
| abstract |
(57) [Problem] To provide a method for removing fine particles capable of effectively removing contaminant fine particles adhered to the surface of an object to be cleaned in industries handling electronic materials such as semiconductors and liquid crystals. A method for removing fine particles, comprising contacting reducing water obtained by adding a reducing agent to water with an object to be cleaned to remove fine particles from the surface of the object to be cleaned. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100867287-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0197268-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013197478-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002069495-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7396806-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012174794-A |
| priorityDate |
1997-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |