http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11131244-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03G5-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 1997-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87d2143c0ec81fd7bf3714aa78a28386 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93d9ccebf6afe500a0a91036f616c13c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8298680bf7fc3f0063af2f45131c3b5 |
| publicationDate | 1999-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H11131244-A |
| titleOfInvention | High frequency electrode for plasma generation, plasma CVD apparatus and plasma CVD method constituted by the electrode |
| abstract | (57) [Problem] To provide a semiconductor device efficiently by stably forming a high-quality deposited film having a very uniform film thickness and a uniform film quality on a large-area substrate at a high speed. It is an object of the present invention to provide a plasma-generating high-frequency electrode that can be used, a plasma CVD apparatus and a plasma CVD method constituted by the electrode. The present invention relates to a rod-shaped or plate-shaped plasma generating high-frequency electrode for generating plasma by high-frequency power, and a grounding portion at a tip end opposite to a feeding point of the plasma generating high-frequency electrode. The absolute value of the reactance is characterized by being not more than a certain value in order to obtain the stability of discharge, characterized in that the electrode constitutes a plasma CVD apparatus and a plasma CVD method. is there. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7047903-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009142016-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8917022-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9165748-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5747231-B2 |
| priorityDate | 1997-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.