http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11128691-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c0cf2b07e06a013dd6f93e4608ea2ee4 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D61-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-469 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-461 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D61-44 |
| filingDate | 1997-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_211f376d11451ddc5e620f8a86e0dbf6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11dabcffb8cedd16f1dbfc1b0f4f6963 |
| publicationDate | 1999-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H11128691-A |
| titleOfInvention | Photoresist developer recovery and recovery system |
| abstract | (57) [Summary] (with correction) [PROBLEMS] To provide a photoresist developer reclaiming and recovering apparatus capable of recovering a regenerative developer capable of performing stable development from a photoresist developing waste liquid and supplying it to a developing device. SOLUTION: An electrodialysis apparatus and / or an electrodialysis apparatus for separating and concentrating tetraalkylammonium ions from a photoresist developing waste solution mainly containing a photoresist and a tetraalkylammonium ion or a processing solution derived therefrom, and / or Alternatively, the present invention is an electrolysis apparatus and a photoresist developer recycling and recovery apparatus provided with a temperature controller having a cooling function at a subsequent stage of the electrolysis apparatus. When an ion exchange device is further provided after the electrodialysis device and / or the electrolysis device, a temperature controller having at least a cooling function is provided between the two devices to secure the adsorption capacity of the ion exchange resin, prevent deterioration, and It is preferable from the viewpoint of reducing the amount of eluted substances from the ion exchange resin. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022210525-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006154279-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6656280-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6503568-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114163059-A |
| priorityDate | 1997-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 52.