http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1097089-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03G5-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 1996-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4fc7c5bc7c03cd0912b6e6032d47f2e |
| publicationDate | 1998-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H1097089-A |
| titleOfInvention | Apparatus and method for manufacturing light receiving member |
| abstract | PROBLEM TO BE SOLVED: To quickly and accurately control the temperature of the surface of a cylindrical support on which a film is formed, simplify the inside of a reaction vessel, improve the film characteristics of a deposited film, and simplify a deposited film forming apparatus. , Improved reproducibility, Improve film productivity, increase mass production yield, and achieve low-cost and easy mass production. SOLUTION: A reaction container having a film-forming space capable of vacuum sealing is provided, and a source gas for film-forming gas introduction means, a high-frequency energy introduction means, and a cylindrical support holding means are provided in the reaction vessel. The glow discharge is excited in the film-forming space by the high-frequency energy introducing means, and the cylindrical support holding means of the light receiving member manufacturing apparatus by the high-frequency plasma CVD method in which the film is deposited on the cylindrical support has one wall surface of the reaction vessel. An apparatus for manufacturing a light-receiving member, comprising a space inside the inside of a reaction vessel, the space being in communication with the outside of the reaction vessel, and a space in which a heating means and a cooling means can be attached and detached. |
| priorityDate | 1996-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.