abstract |
(57) [Summary] In a manufacturing process of a surface protective film, development is performed with an aqueous solution in a short time with high resolution. A photosensitive polyimide precursor containing 10 mol% or more of a repeating unit represented by the following general formula (1), which is soluble in a basic aqueous solution, is cured by exposure to light, and is insoluble in the basic aqueous solution. Is used. In the formula, R 1 is a tetravalent organic group containing 4 or more carbon atoms, R 2 is a trivalent or tetravalent organic group containing an aromatic ring, R 3 is a monovalent organic group, and A is an acidic group. And n is 1 or 2. Embedded image |