| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-16 |
| filingDate |
1996-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fb85c5a4540a2863238af22cab3999e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd210da49357a07eeaef5da05a012449
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7120704098113329f245a4b1c91d7098
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75f6a9e10fc9a83f74ca49be8f4ad422 |
| publicationDate |
1998-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H1079381-A |
| titleOfInvention |
Method for forming insulating film pattern and photosensitive composition |
| abstract |
(57) [Problem] To provide a method capable of easily forming a high-precision and low-dielectric-constant insulating film pattern which is capable of alkali development. SOLUTION: A step of applying a photosensitive composition containing a first silicon polymer having a predetermined monomer and a second silicon polymer having a predetermined monomer on a substrate to form a photosensitive composition film And a step of subjecting the photosensitive composition film to selective exposure to light and then alkali developing, and a step of heat-treating the developed photosensitive composition film pattern. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8378050-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013089971-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007273494-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012532342-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0020927-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7943721-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9470978-B2 |
| priorityDate |
1996-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |