Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cd23c354dd49d149991d5e4d2af08b17 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L35-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L35-20 |
filingDate |
1996-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db39a46669c54dbebdd73e663744016b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bd83e09ca70134cc0359fdca884c675 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03ec4431f3460498f0a8b46bc94fef31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b66a51f827824236ea983143d67d9e3e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07c2dd5c5d77fdad44ad824a968aaff3 |
publicationDate |
1998-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-H1074985-A |
titleOfInvention |
How to make thermoelectric materials |
abstract |
(57) [Problem] To provide a method of manufacturing a thermoelectric material capable of obtaining a lead telluride-based material capable of achieving simplification of a manufacturing process and improvement in performance as a thermoelectric material. SOLUTION: A first target mainly composed of lead and a second target mainly composed of tellurium are manufactured, and a first target facing a substrate to be film-formed is placed in a film-forming chamber maintained under reduced pressure and vacuum. A second target is provided, and the first and second targets are irradiated with laser light to generate plumes from the first and second targets, respectively, and vapor-deposit them on a substrate to produce a thermoelectric material. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3151292-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005092420-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9954155-B2 |
priorityDate |
1996-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |