http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1074775-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-338 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-812 |
| filingDate | 1996-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b3b5e2d22fe92801013844abb05fed4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cac0d0cc5fb5fd4d0d7fc56b4d6315ee http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79421bf3eacd7943817c22253fc1315d |
| publicationDate | 1998-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H1074775-A |
| titleOfInvention | Semiconductor device and manufacturing method thereof |
| abstract | PROBLEM TO BE SOLVED: To reduce the damage and stress on the surface of a channel layer of a semiconductor substrate and to suppress the generation of negative charges and levels near the surface of the channel layer of the semiconductor substrate, thereby stabilizing the characteristics. A semiconductor device and a method for manufacturing the same are provided. SOLUTION: The FET according to the present invention employs a process that does not damage the surface of a semiconductor substrate when forming a surface protective film, and the material of the surface protective film is also: One of the characteristics is to use a material that stabilizes electrical characteristics of a semiconductor substrate surface. Further, one of the characteristics of the FET according to the present invention is that the level on the surface of the semiconductor substrate is electrically neutralized and stabilized by increasing the electron density on the surface of the channel layer. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013143503-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008091699-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10074736-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014078557-A |
| priorityDate | 1996-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.