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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-14
filingDate 1996-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd8bf44a61ac0101557d37defd4064dc
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publicationDate 1998-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H1074450-A
titleOfInvention Manufacturing method of shadow mask
abstract (57) [Problem] To provide a method of manufacturing a shadow mask capable of suppressing variation in aperture size and shape and obtaining a high quality shadow mask having excellent uneven quality. SOLUTION: A resist having a pattern corresponding to an opening of a shadow mask is formed on both surfaces of a metal thin plate, and the metal thin plate on which the resist is formed is etched using a ferric chloride solution to form the opening. In the method of manufacturing a shadow mask to be formed, a ferric chloride solution adhering to a metal sheet after etching is replaced with an etching inhibitor liquid that is inert to the metal sheet.
priorityDate 1996-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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