http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1062997-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fc6220b93fae4be14ada49e4ecc1860b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 1997-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cfcfcee680696b6f10f215f47e457b36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e741e2370a4d001d8ee2356810e27adf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1f443c4b61b7b71ea5ee42040b4badf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84a6f241c8d3471b386f7c359ade3711 |
| publicationDate | 1998-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H1062997-A |
| titleOfInvention | Chemically amplified resist material |
| abstract | (57) [Summary] [PROBLEMS] When used as a resist material for exposure to a light source of 300 nm or less, for example, KrF excimer laser light (248.4 nm), a fine pattern with a submicron-order shape can be easily obtained. Provided resist material and a pattern forming method using the same. A monomer unit having a functional group capable of undergoing a chemical change by heating and becoming alkali-soluble in the presence of an acid generated from a photosensitive compound by exposure, and a monomer unit having a phenolic hydroxyl group, if necessary. A resist material characterized by using a polymer composed of a monomer unit and a photosensitive compound having a high light transmittance around 248.4 nm and generating an acid upon exposure or irradiation. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10186665-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004077811-A |
| priorityDate | 1990-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 239.