abstract |
(57) [Summary] [PROBLEMS] A tissue having a geometrical undercut portion or a hollow chamber is formed by a classic MIGA process or LI. It can be manufactured by the method steps of the GA process. SOLUTION: A nozzle plate (30) has two parts (17. 18) are manufactured separately from each other. Both parts (17.1 The fabrication of 8) is performed by microstructure / lithography, electroforming, and molding with plastic. The joining of both parts (17, 18) is performed by laser welding, diffusion joining or chemical joining. |