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publicationDate 1998-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H1057842-A
titleOfInvention Production method of nozzle plate
abstract (57) [Summary] [PROBLEMS] A tissue having a geometrical undercut portion or a hollow chamber is formed by a classic MIGA process or LI. It can be manufactured by the method steps of the GA process. SOLUTION: A nozzle plate (30) has two parts (17. 18) are manufactured separately from each other. Both parts (17.1 The fabrication of 8) is performed by microstructure / lithography, electroforming, and molding with plastic. The joining of both parts (17, 18) is performed by laser welding, diffusion joining or chemical joining.
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