| abstract |
(57) [Abstract] [Object] To provide a tin oxide functional thin film having excellent selective orientation, transparency, and conductivity and used as a transparent electrode, a crystal substrate, and the like. The present invention comprises forming a selectively oriented tin oxide film (TO) on a (200) plane by spray pyrolysis of an organic solvent liquid of dibutyltin diacetate on a glass substrate. Spray pyrolysis of a solution to which an element having one more outermost electron than tin or oxygen such as fluorine is added, and tin oxide containing an element having one more outermost electron than tin or oxygen such as antimony or fluorine A film (ATO or FTO) is formed. [Effect] The selective orientation of (200) plane of (ATO or FTO) on the tin oxide film selectively oriented to (200) plane is enhanced, and the thin tin oxide excellent in conductivity and transparency is obtained. It becomes a film. |