| abstract |
(57) [Summary] The X-ray inspection apparatus (1) includes a filter (4) provided between an X-ray source (2) and an X-ray detector (3). The X-ray filter is made up of a number of filter elements (5), the X-ray absorption of said filter elements can be adjusted by controlling the amount of X-ray absorbing liquid (6) in said filter elements. The filter element is formed by a metal capillary or a wall of a metal capillary, or a metal layer (7) is provided on the wall of the capillary. A dielectric layer (8) is provided on the metal layer, and the dielectric layer is covered by a coating layer (9). The dielectric layer is, for example, a glass, parylene or polystyrene layer. The coating layer is, for example, a Teflon, silane or siloxane layer. The dielectric layer can be omitted when a Teflon coating layer is used. |