| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-354
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1309 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-3083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0665
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0648 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-35 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-067
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-00 |
| filingDate |
1995-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1998-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H10500628-A |
| titleOfInvention |
Multi-wavelength laser optical system for probe station and laser cutting |
| abstract |
SUMMARY A single passive air-cooled Nd: YAG laser (100) mounted with a base machine (10), a probe table (17) mounted on the base machine (10), and a microscope (22). And a probe station including. The single laser provides an output beam to a first nonlinear crystal (106) for generating a second harmonic of the fundamental output wavelength. The beam is then passed by a reflector (107) at a 90 ° angle to a polarizer (108) that repolarizes the fundamental wavelength. The beam is then directed by a mirror (111) to a variable attenuator (112) and the appropriate output wavelength of infrared (1064 nm), green (532 nm) or ultraviolet (355 or 266 nm) is selected. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4690841-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014135341-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007101227-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7592565-B2 |
| priorityDate |
1994-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |