| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-10056
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-30148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-10152 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-0004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-94 |
| filingDate |
1996-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41aa5025ae3a17f09623f4948861a475
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e1d9ca31979e69f1cb3edc075dd84dd |
| publicationDate |
1998-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H1048145-A |
| titleOfInvention |
Micro foreign matter detection method and its detection device |
| abstract |
(57) [Problem] To detect a foreign substance on the entire surface of a sample, a conventional foreign substance detection device is configured to observe a part of the sample. There has been a problem that a system that allows observation of the entire surface of the sample must be added. SOLUTION: A sample 2 or a microscope 8 is intermittently arranged at a pitch equal to or less than a range of a CRT screen 100 in an xy plane. Alternatively, the entire surface of the sample 2 can be observed by moving the sample 2 continuously. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109029304-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010536034-A |
| priorityDate |
1996-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |