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filingDate 1997-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_318b17b2c248ef21a618574af5733442
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publicationDate 1998-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H10330920-A
titleOfInvention Evaporation method and equipment
abstract PROBLEM TO BE SOLVED: To provide a vapor deposition method and a vapor deposition apparatus for an organic material having excellent productivity. SOLUTION: A step of continuously supplying an organic material powder to a heating unit in a vacuum, a step of heating and vaporizing the organic material powder, and a step of applying the vaporized organic material to a surface of a substrate. And e. Depositing on the substrate.
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