http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10319587-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1997-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8299e5d23e6728a39d8a6cf557471f68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7078bf6026b8eb8f789155ae6b65fffd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5025a2c4e83e8edabbb7c1c0d9f27b81 |
| publicationDate | 1998-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H10319587-A |
| titleOfInvention | Radiation-sensitive resin composition |
| abstract | (57) [Problem] To provide a radiation-sensitive resin composition having excellent focus tolerance, sensitivity, and resolution, which is useful as a positive resist for manufacturing a highly integrated circuit. SOLUTION: In a radiation-sensitive resin composition containing an alkali-soluble phenol resin and a quinonediazide compound, the alkali-soluble phenol resin is a condensate of a phenol and an aldehyde containing p-cresol as an essential component, and The alkali-soluble phenolic resin is detected as a pyrolysis product when measured at a pyrolysis temperature of 670 ° C. by pyrolysis gas chromatography using a capillary column having a silicone phase containing permethylated α-cyclodextrin on the inner surface. A radiation-sensitive resin composition having a relationship of X / Y ≧ 2.0 between the peak area value X of cresol and the peak area value Y of 2,4-dimethylphenol. |
| priorityDate | 1997-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 144.