http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10311818-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9772a8e55046288ba4602b2f27aea856 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98bbc186b0291ed5603de229258a7a95 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-305 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-416 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q20-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-30 |
filingDate | 1997-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_19b306e23af84a94297c41f44e8f06e2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e34102c5f6364b42b4c1be50ca36f7c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_918c8501896b875514f84aea956e91c7 |
publicationDate | 1998-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-H10311818-A |
titleOfInvention | Material evaluation method |
abstract | (57) [Summary] [PROBLEMS] To provide a material evaluation method capable of easily and quickly evaluating the characteristics of various materials, and accurately and reliably even if the number of materials is small. SOLUTION: The sensor surface 5 of an optical scanning type two-dimensional concentration distribution measuring device having a sensor surface 7 on one surface of a semiconductor substrate 5 and configured to irradiate the semiconductor substrate 5 with probe light 3 is provided. A solution or gas is provided so as to come into contact with, and a distribution of minute substance concentrations or physical parameters caused in the solution 24 or gas 43 when the evaluation target material 23 is provided so as to come into contact with the solution 24 or gas 43 Change was detected. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11101774-A |
priorityDate | 1997-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3000706 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416215473 |
Total number of triples: 20.