| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S204-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-008 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-08 |
| filingDate |
1997-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b2a246108cfb217b0197be7d504f642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da2a44be0307c961f2e7e659e514729b |
| publicationDate |
1998-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H10298795-A |
| titleOfInvention |
Mesh electrode, plating apparatus and plating method using the mesh electrode |
| abstract |
(57) [Problem] To provide a plating apparatus and a plating method for improving the uniformity of a plating film thickness without changing a supply flow rate of a plating solution 7. An opening portion (14a) is provided in a central portion of an anode mesh electrode (14) of a plating apparatus, and an electric field density distribution between the anode mesh electrode (14) and a wafer (101) is made lower at a wafer central portion than at a wafer peripheral portion. To do. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018040048-A |
| priorityDate |
1997-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |