| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S257-903 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76838
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76852 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 |
| filingDate |
1998-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e7a6d6806784e2f36ef855d2dd76039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09dc2cf6e1bd09fbcd1a5bee8b171546
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbca7d93946c02703c5b1d15a442cb9f |
| publicationDate |
1998-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H10289949-A |
| titleOfInvention |
Interconnect using metal spacers and method of forming same |
| abstract |
(57) [Summary] To increase the conductivity between interconnect lines between levels. In a preferred embodiment, sidewall spacers are used on the sides of the interconnect lines to increase the contact area between the interconnect lines and the interconnect studs. This increase in the contact area improves the connection resistance and achieves miniaturization of the device without reducing the conductivity of the connection and without significantly increasing the cost of the manufacturing process. |
| priorityDate |
1997-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |