| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_00823c653968e3a68b83716db4a4e010 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B13-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05D11-08 |
| filingDate |
1997-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a6b549f3ff548431e14d01e897df8ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22e4c1e518c0799500e359d92a3ed9e7 |
| publicationDate |
1998-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H10287404-A |
| titleOfInvention |
Supply method of constant concentration ozone |
| abstract |
(57) [Problem] To provide an ozone supply method capable of supplying a stable concentration of ozone gas. SOLUTION: A diluent gas introduction path (24) is connected to a transfer path (6) for desorbed ozone gas from an ozone adsorbent (2) holding and holding ozone gas, and a desorbed ozone transfer path (6). The concentration of the ozone gas flowing through the diluent is detected, and the flow rate of the dilution gas from the dilution gas gas introduction path (24) is controlled based on the detected concentration. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-1318317-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7146138-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1538129-A1 |
| priorityDate |
1997-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |