| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0aaaf1fba35e2237ea651206136e877b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67034
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
1997-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01e02f9c4cbd50806634fc34f2f8c182
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ccfacc9daa5f65afd08dcb9bd1c8126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff17eefe512ab904b83b964b157224ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d46210a650f6b8a0885d92bdc6a0613d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_edcfe9721e5b331b10419d0eef594f19 |
| publicationDate |
1998-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H10284461-A |
| titleOfInvention |
Drying apparatus and drying method |
| abstract |
(57) [Summary] [PROBLEMS] To stabilize the state of IPA vapor and reduce or eliminate poor drying. SOLUTION: An opening 22 opening above a processing tank 11 is provided. The nozzle 13 and the exhaust member 14 are provided so as to be opposed to each other. The side wall of the processing tank 11 smoothly curves inward as it approaches the opening 22 from below. The nozzle 13 jets nitrogen gas supplied from the nitrogen gas supply device 18 toward the exhaust port of the exhaust member 14 as a jet 21 covering the opening 22. Since the jet 21 effectively functions as a curtain due to the curvature of the side wall of the processing tank 11, the cooling coil required in the conventional apparatus is not required. Therefore, the instability of the state of the IPA vapor 5 due to the cooling coil is eliminated. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100447285-B1 |
| priorityDate |
1997-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |