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filingDate 1997-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5e996f771c0078abddb402c9e95e7d4
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publicationDate 1998-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H10275683-A
titleOfInvention Thin-film laminated conductor
abstract (57) [Problem] To provide a laminated conductor of a metal thin film made of an Al-based alloy and a transparent conductive thin film, which has no hillock and low resistance, and has a small resistance. The patterned Al on a transparent substrate is provided. Or the first conductor 2 which is a metal thin film made of an Al-based alloy And a second conductor which is a transparent conductive thin film made of a patterned metal oxide, wherein the first conductor is on the substrate side and has at least a portion on which the second conductor is laminated. In the thin film laminated type conductor, the transparent conductive thin film 3a is made amorphous. Or, The first conductor is a laminated film made of Al or an Al-based alloy covered with a metal thin film made of a high melting point metal.
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