| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2dcebf5a7f7ddc3b081f70e8ce1c4097 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02582 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-25 |
| filingDate |
1998-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48b12f292b2f8ffd4e2c735e052cc041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ab0e07a91a80d7353b1dd9b8d45d14e |
| publicationDate |
1998-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H10270978-A |
| titleOfInvention |
Surface acoustic wave device and method of manufacturing the same |
| abstract |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave device capable of improving characteristics of a piezoelectric layer and thereby easily obtaining a surface acoustic wave device having excellent acoustic characteristics, and a method of manufacturing the same. I do. SOLUTION: A diamond layer 1 for transmitting a surface acoustic wave is formed on a substrate 2, and a comb-shaped transducer electrode 4 is formed on the diamond layer 1. Then, an intermediate layer 3 made of SiO 2 having an extremely small thickness so as to cover the diamond layer 1 and the transducer electrode 4. Are formed, and the piezoelectric layer 5 is formed on the intermediate layer 3. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022230723-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023162448-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8186028-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007036656-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011519160-A |
| priorityDate |
1997-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |