http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10265958-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7c5a4ae81822d214a07bf55ad61bd1cf |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04 |
| filingDate | 1997-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e7434c7fa64bed0f73d72c9923078ee |
| publicationDate | 1998-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H10265958-A |
| titleOfInvention | Method and apparatus for manufacturing tubular body with film formed on inner peripheral surface |
| abstract | (57) [Summary] [Problem] Even on a tube with a small inner diameter, the inner surface of the Alternatively, a method capable of forming a film on the inner peripheral surface with high productivity by using an apparatus having a simple structure, capable of forming a film uniformly and a method of manufacturing such a tube A device having a simple structure capable of performing the method is provided. SOLUTION: In a state in which the outside of a film-forming tube S made of a conductive material is covered with an electrically insulating member 2a, the inside of the tube S is formed from an end of the tube S via a gas introduction member 4. While introducing the film-forming raw material gas, the tube S is supplied with a basic high-frequency electric power of a predetermined frequency of 13.56 MHz or more at a frequency of 10% of the predetermined frequency. By supplying high-frequency power in a state where amplitude modulation is performed at a modulation frequency of 1,000,000th or more and 1 / 1000th or less, the introduced film-forming raw material gas is turned into plasma, and the inner periphery of the tube S is formed under this plasma. A method and an apparatus for manufacturing a tube having a film formed on an inner peripheral surface on which a film is formed on a surface. |
| priorityDate | 1997-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.